Abstract
An integrated-optic fluid sensor utilizing the heat-transfer phenomenon is proposed. An optical waveguide interferometer is used to convert the temperature of the waveguide surface exposed to the surrounding fluid into an intensity modulated light signal. The temperature changes with the variation of a certain physical property of the fluid when the substrate is steadily heated. The expected characteristics are discussed for measurement of the rarefied gas pressure and the air humidity. Also a humidity sensing experiment was carried out by constructing and testing a device using a LiNbO(3) waveguide to confirm its basic performance.
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