Abstract
On-chip integrated solenoid inductors with nanogranular FeCoTiO magnetic cores have been fabricated. Both single-layered and multilayered magnetic cores with different geometries were studied. An inductance of 14.2 nH was achieved when using a multilayered core structure and keeping the device area of 0.14 mm2. The inductance of the magnetic core inductor is $\sim 14$ times that of the air core inductor, and the quality factor is 7.5. The permeability trends calculated from inductance were compared with the permeability spectra of the patterned FeCoTiO films measured by an improved shorted microstrip transmission line perturbation method. Consistent results have been obtained after considering the demagnetization effect of the magnetic core with high permeability.
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