Abstract
The construction and characteristics of sorption polymeric relative humidity sensors, sorption SiO x microhumidity sensors and condensation- type (dew-point) sensors are compared. The characteristics of the sensors are examined in a dew-point range from − 80 to + 20 °C. An integrated multifunctional humidity sensor for measurements in a wide humidity range at different conditions has been developed. The sensors are intended for use in various branches of industry, and in scientific research.
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