Abstract
We present an integrated monolithic, electrostatic 3D MEMS scanner with a compact chip size of 3.2 × 2.9 mm(2). Use of parametric excitation near resonance frequencies produced large optical deflection angles up to ± 27° and ± 28.5° in the X- and Y-axes and displacements up to 510 μm in the Z-axis with low drive voltages at atmospheric pressure. When packaged in a dual axes confocal endomicroscope, horizontal and vertical cross-sectional images can be collected seamlessly in tissue with a large field-of-view of >1 × 1 mm(2) and 1 × 0.41 mm(2), respectively, at 5 frames/sec.
Highlights
Endomicroscopes perform optical sectioning, and can collect in vivo images in the epithelium of hollow organs, such as colon, with sub-cellular resolution
We developed a finite element model (FEM) using ANSYS software to assess the distribution of stress throughout the scanner
We found the mirror surface have a radius of curvature of ~2.0 m and a root mean square (RMS) roughness of ~2 nm
Summary
Endomicroscopes perform optical sectioning, and can collect in vivo images in the epithelium of hollow organs, such as colon, with sub-cellular resolution. This thin layer of tissue has high metabolic activity, and is the origin of many cancers. Current clinical instruments use a flexible optical fiber coupled to an objective lens in a single axis configuration, and visualizes in horizontal planes (parallel to tissue surface) only. The vertical view can accurately localize where disease is occurring relative to the tissue surface. Pathologists use this orientation to stage progression of early cancer
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