Abstract
We present a multisensor designed for industrial compressed air diagnostics and combining the measurement of pressure, flow, and temperature, integrated with the corresponding signal conditioning electronics in a single low-temperature co-fired ceramic (LTCC) package. The developed sensor may be soldered onto an integrated electro-fluidic platform by using standard surface mount device (SMD) technology, e.g., as a standard electronic component would be on a printed circuit board, obviating the need for both wires and tubes and thus paving the road towards low-cost integrated electro-fluidic systems. Several performance aspects of this device are presented and discussed, together with electronics design issues.
Highlights
In the past years, the fields of sensors and microfluidics in low-temperature co-fired ceramic (LTCC) technology have been increasingly studied [2,3,4,5,6,7,8,9,10,11], adding new possibilities to this material initially developed for demanding electronics and packaging applications [11,12,13,14,15,16]
In this work we propose, for the first time, a combined surface mount device (SMD) sensor in LTCC for measuring gauge compressed air pressure, flow and accessorily temperature, integrating signal conditioning electronics for linearization, adjustment and temperature compensation
Flow sensor principle: anemometric, with 1 heating thermistor suspended on a bridge in the airflow
Summary
The fields of sensors and microfluidics in LTCC technology have been increasingly studied [2,3,4,5,6,7,8,9,10,11], adding new possibilities to this material initially developed for demanding electronics and packaging applications [11,12,13,14,15,16]. Many devices of various types are available on the commercial fluidic sensor market offering high precision measurements ( 0.3% of full scale). They usually require physical mounting by tightening and fluidic interconnection with large gas fittings (e.g., G1/2"). The electrical lines transit through connectors such as the DB9 or standard copper wires. These sensors are generally priced well above
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