Abstract
This paper presents the integration of an inductor by complementary metal-oxide-semiconductor (CMOS) compatible processes for integrated smart microsensorsystems that have been developed to monitor the motion and vital signs of humans invarious environments. Integration of radio frequency transmitter (RF) technology withcomplementary metal-oxide-semiconductor/micro electro mechanical systems (CMOS/MEMS) microsensors is required to realize the wireless smart microsensors system. Theessential RF components such as a voltage controlled RF-CMOS oscillator (VCO), spiralinductors for an LC resonator and an integrated antenna have been fabricated and evaluatedexperimentally. The fabricated RF transmitter and integrated antenna were packaged withsubminiature series A (SMA) connectors, respectively. For the impedance (50 ) matching,a bonding wire type inductor was developed. In this paper, the design and fabrication of thebonding wire inductor for impedance matching is described. Integrated techniques for theRF transmitter by CMOS compatible processes have been successfully developed. Aftermatching by inserting the bonding wire inductor between the on-chip integrated antennaand the VCO output, the measured emission power at distance of 5 m from RF transmitterwas -37 dBm (0.2 μW).
Highlights
Intelligent human sensing systems and wearable medical monitoring and alert systems have been proposed for high-risk and chronically ill patients, and for other healthcare field applications
The development of an integration technique for radio frequency transmitter (RF) transmitters to include an integrated inductor that will be integrated on smart microsensors is presented
The transmitter can be realized by standard complementary metal-oxide semiconductor (CMOS) technology, and it is integrated with CMOS/MEMS sensors
Summary
Intelligent human sensing systems and wearable medical monitoring and alert systems have been proposed for high-risk and chronically ill patients, and for other healthcare field applications. One of the objectives of our research work is the realization of wireless smart microsensor systems developed to monitor the activity and multiple vital signs of humans in various environments. The system can collect data during the subject’s daily routine, providing health information in real-time to medical researchers To meet this objective this system should be a wearable, mobile, and fully integrated wireless sensor system. Wearable sensing systems and smart sensors that are integrated with the communication circuit have been reported. They will be the essential sensor elements for detection of human motion and nerve activity for the purpose of intelligent human sensing. The development of an integration technique for RF transmitters to include an integrated inductor that will be integrated on smart microsensors is presented
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