Year-end Sale % OFF 
Abstract
AbstractThis paper discusses an integrated hybrid MEMS hydrogen sensor that detects hydrogen in the range from 5 ppm to 100 vol%. The sensor is a single chip comprising both capacitive and thermal conductivity hydrogen sensors that can be fabricated simultaneously using the same process flow. The capacitive sensor detected hydrogen at concentrations as low as 5 ppm without a heater. The thermal conductivity sensor measured high hydrogen concentrations and had a low power consumption of several tens of milliwatts. The integrated hybrid MEMS hydrogen sensor showed a high gas selectivity.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
