Integrated Fabry–Pérot distance control for atomic force microscopy

Abstract

This article reports on the first “standalone” optical atomic force microscope (AFM) based on an integrated Fabry–Pérot AFM sensor. The new AFM consists of two components: a cantilever with an integrated tip and a Fabry–Pérot cavity and an optical system for supply and detection of the light. A batch process for the reproducible production of the new Fabry–Pérot cantilever by thin film technology is described. The tip diameters achievable are below 10 nm. The Fabry–Pérot gap of approximately 7 μm realized reduces thermal drift and phase noise. The optical system is produced by high precision mechanics. It consists of one part that is fixed to the piezo tube and another part that can be exchanged. The advantage of the new AFM is the high resolution of the integrated optical detection system combined with an easy handling system for cantilever exchange without any adjustment. This makes the approach very attractive as a standard tool for inspection in semiconductor industry, surface manipulation on a nanometer scale, or surface studies in ultrahigh vacuum.