Abstract
Single and binary component patterning and integrated microfabrication of biomolecules, such as DNA and proteins, can be achieved by focused ion-beam (FIB) biolithography. Well-defined micropatterns are obtained by FIB milling on biomolecules immobilized on SiO2 wafers and protected by a thin Au film. The retention of biofunctionality is excellent (68–90%) and a feature size of down to 500 nm can be achieved for the patterns without significant loss of functionality.
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