Abstract
空间晶体生长炉控制对象复杂, 具有纯滞后、强耦合、非线性等不利于控制的特性. 为实现炉温的精确控制, 提出了一个空间晶体生长炉综合控制方法并通过软件来实现. 将相关系数法和增广递推最小二乘法相结合, 辨识系统模型, 使用Hooke-Jeeves模式搜索法进行PID参数的自整定, 采用PID加前馈控制的算法对系统进行仿真, 使用同样的算法和控制参数对空间晶体生长炉进行实时控制, 并在控制的过程中实时调整控制参数, 以达到最佳的控制结果. 实验结果表明, 当三个温区的温度均达到700ºC时, 温度稳定度小于±0.3ºC, 满足系统设计要求. 同时介绍了实现综合控制软件的基本原理、功能、特点及在实际中的应用. 实际工程的应用结果表明, 该软件可满足空间晶体生长炉对控制系统的要求.
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