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Abstract
A 60-channel WDM demultiplexer based on a concave grating with 0.144 nm channel spacing in the 1.5 µm wavelength region was fabricated. The demultiplexer comprises SiO2/SiON/SiO2 waveguides on Si and an individual channel has a full width at half maximum spectral width of 0.09 nm.
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