Integrated Chemiresistor Sensors with Preconcentrators for Monitoring Volatile Organic Compounds in Water

Abstract

Chemiresistor microsensors have been developed to provide continuous insitu detection of volatile organic compounds (VOCs). The chemiresistor sensor is packaged in a rugged, waterproof housing that allows the device to detect VOCs in air, soil, and water. Preconcentrators are also being developed to enhance the sensitivity of the chemiresistor sensor. The “micro-hotplate” preconcentrator is placed face-to-face against the array of chemiresistors inside the package. At prescribed intervals, the preconcentrator is heated to desorb VOCs that have accumulated on the sorbent material on the one-micron-thick silicon-nitride membrane. The pulse of higher-than-ambient concentration of VOC vapor is then detected by the adjacent chemiresistors. The plume is allowed to diffuse out of the package through slots adjacent to the preconcentrator. The integrated chemiresistor/preconcentrator sensor has been tested in the laboratory to evaluate the impacts of sorbent materials, fabrication methods, and repeated heating cycles on the longevity and performance of the sensor. Calibration methods have also been developed, and field tests have been initiated.