Abstract
Integrated electronic circuitries with pressure sensors have been extensively researched as a key component for emerging electronics applications such as electronic skins and health-monitoring devices. Although existing pressure sensors display high sensitivities, they can only be used for specific purposes due to the narrow range of detectable pressure (under tens of kPa) and the difficulty of forming highly integrated arrays. However, it is essential to develop tactile pressure sensors with a wide pressure range in order to use them for diverse application areas including medical diagnosis, robotics or automotive electronics. Here we report an unconventional approach for fabricating fully integrated active-matrix arrays of pressure-sensitive graphene transistors with air-dielectric layers simply formed by folding two opposing panels. Furthermore, this realizes a wide tactile pressure sensing range from 250 Pa to ∼3 MPa. Additionally, fabrication of pressure sensor arrays and transparent pressure sensors are demonstrated, suggesting their substantial promise as next-generation electronics.
Highlights
Integrated electronic circuitries with pressure sensors have been extensively researched as a key component for emerging electronics applications such as electronic skins and healthmonitoring devices
After forming the origami substrate composed of two plastic panels and a foldable elastic joint, graphene channels, electrodes of S/D/interconnects and elastomeric partition spacers of photo-patternable polydimethylsiloxane (p-PDMS) to define local areas of air gaps are patterned on one panel side
The integrated electronic devices with tactile pressure sensors have been widely researched for the emerging technologies such as electronic skins or health-monitoring devices
Summary
Integrated electronic circuitries with pressure sensors have been extensively researched as a key component for emerging electronics applications such as electronic skins and healthmonitoring devices. We report an unconventional approach for fabricating fully integrated active-matrix arrays of pressure-sensitive graphene transistors with air-dielectric layers formed by folding two opposing panels This realizes a wide tactile pressure sensing range from 250 Pa to B3 MPa. fabrication of pressure sensor arrays and transparent pressure sensors are demonstrated, suggesting their substantial promise as next-generation electronics. The height of air gaps is determined by the thickness of elastomeric partition spacers between the graphene and top-gate, and decreased by applying pressure with increasing capacitance of the metal-airgraphene structure This pressure-sensitive capacitance change enables the individual FET to act as a single tactile pressure sensor solely, for a wide detection range from 250 Pa to B3 MPa. the simple integration of these FETs, with no additional component or layer, forms active-matrix pressure sensor arrays directly, which can lead to low fabrication costs and densifications of these sensor arrays. The fabrication of a transparent pressure sensor by utilizing silver nanowire (AgNW)-graphene hybrid transparent electrodes is presented for further applications such as transparent e-skin, or an analogue touch screen panel
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