Integral Sliding Mode Control of Piezo-actuated Stages with the Model-based Iterative Feed-forward Compensating Hysteresis

Abstract

This paper proposes an integral sliding mode control with a novel model-based iterative feedforward compensating the hysteresis to finish high-precision positioning control of the piezoactuated stage. The Bouc-Wen model is established to design a novel iterative feedforward control (IFC) method. The IFC reduces the effects of inherent hysteresis on the positioning precision of the piezo-actuated stage. The positioning error of the IFC is inevitable because of the model uncertainty. Subsequently, an integral sliding mode control algorithm is implemented to further decrease the tracking error and enhance the anti-disturbance capability of the IFC. To reduce the chattering of the proposed controller, a boundary layer method based on Fal-function is designed. The stability of the integral sliding mode control is analyzed via Lyapunov stability theory. The feasibility of the proposed controller is certified by a series of simulation results. Compared with the IFC and conventional sliding mode control (CSMC) method, the proposed controller has higher performance in terms of the positioning precision of piezo-actuated stages.