Abstract
This paper originally applied an optimal sliding mode based optimal composite nonlinear feedback (ISM-CNF) control strategy to the capacitive micromachined ultrasonic transducers (CMUTs) system. It is known that CMUTs system is inherently unstable which results in pull-in phenomenon and sensitive to a small perturbations. Therefore the major problem is to stablize the CMUTS system beyond the pull-in limit with the external disturbances and input saturation. We verified the effectiveness by CNF and optimal ISM-CNF control methods through extending the travel range of the CMUTs gap. The simulation results show the optimal ISM-CNF control law which achieves robustness, quick response, negligible overshoot and extends the travel range to 90% of the initial gap is better than CNF control law in CMUTs system.
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