Integral equations for free-molecule ow in MEMS: recent advancements

Abstract

Abstract We address a Boundary Integral Equation (BIE) approach for the analysis of gas dissipation in near-vacuum for Micro Electro Mechanical Systems (MEMS). Inspired by an analogy with the radiosity equation in computer graphics, we discuss an efficient way to compute the visible domain of integration. Moreover, we tackle the issue of near singular integrals by developing a set of analytical formulas for planar polyhedral domains. Finally a validation with experimental results taken from the literature is presented.