Abstract
Instabilities in Ar capacitively coupled plasmas driven by asymmetric trapezoidal voltage pulses were observed using particle-in-cell simulations. Despite its geometric symmetry, the discharge was electrically asymmetric. The instabilities were electron plasma waves launched from the sheath edge at the time the voltage pulse was applied and were accompanied by local electric field reversal.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Paper version not known
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: IEEE transactions on plasma science. IEEE Nuclear and Plasma Sciences Society
Paper Title
Journal
Date
