In-situ TEM for altering nanostructures and recording the changes at an atomic resolution

Abstract

In recent years, progresses in in-situ transmission electron microscopy (TEM) provided unique imaging and analytical capabilities for studying structural evolutions in versatile environments. Aiming at atomic resolution in-situ TEM capability, various sample holders have been developed by a group led by Takeo Kamino in Hitachi High Technologies Corporation, including gas injection-heating holder, single- and doubletilt heating holders, and double-heater sample holder [1–2]. Using these sample holders, in-situ heating TEM studies in vacuum or in a gas environment, and in-situ evaporation deposition can be done in a standard 300 kV H-9500 high-resolution transmission electron microscope [3], true atomic resolution can be achieved at elevated temperatures for example at 1500°C, and digital recording of the dynamic structural evolutions is realized using a high speed CCD camera.