Abstract
ABSTRACTTwo types of real-time oxygen monitoring are investigated for RTP applications, i.e. addressing the basis for a state-of-the-art clean ambient technology and understanding its impact on real processes. Diagnosing of gas flow dynamics in the chamber is carried out by tracer experiments. Deviation from plug flow, which decreases purge efficiency, is found to be a function of gas flow rate. The monitoring of a typical two-step RTP process for silicidation of Ti or Co show that both adsorption and desorption take place. Oxygen is desorbed first at lower temperatures (during temperature ramp) then starts to be adsorbed at higher temperatures. In the case of Ti, a few monolayers of oxygen is adsorbed during the first RTP but less oxygen is adsorbed during the second RTP. The amount of oxygen adsorbed during Co RTP is found to be not as high as during Ti RTP.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callSimilar Papers
More From: MRS Proceedings
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
