In-Situ Measurement Method and Rate Theory for Clarifying Multi-Component Organic Compounds Adsorption and Desorption on Silicon Surface

Abstract

Surface concentration of organic compounds, isopropanol and diethyl phthalate, on a silicon surface in a single-component system and in a two-component system was measured in-situ using a quartz crystal microbalance in ambient nitrogen with controlled humidity. The measured behavior was analyzed based on the rate theory. The surface concentration in a steady state changes corresponding to the gas phase concentrations of isopropanol and diethyl phthalate. The measurement results are interpreted under the assumption that the larger limit of surface concentration in a multi-component system depends on the rate parameters and the gas phase concentration of the organic compounds.