Abstract
The role of composition and oxygen pressure in in-situ growth of superconducting YBaCuO films by reactive coevaporation has been studied. Films made at low pressure have an expanded c-axis compared to the bulk value, although their T c 's may only be slightly depressed. A detailed analysis of x-ray diffraction data for these films was carried out. The results support the conclusion that cation disorder is occuring at the low pressure during growth. A model based on Ba-for Y substitution is found to be consistent with these results.
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