Abstract
An improved hybrid physical chemical vapor deposition (HPCVD) method for the preparation of magnesium diboride (MgB2) films is proposed. In this experiment, the temperature for the evaporation of magnesium is set to be ∼700°C, while the substrate is kept below 500°C. Inside the vacuum chamber, double heaters control the temperature for the evaporation of Mg and of the substrate independently. The deposition of MgB2 films on a polycrystalline Al2O3 substrates is obtained by the reaction between evaporated magnesium atoms and boron atoms that decompose from diborane near the heaters. The superconducting MgB2 films show a transition temperature at 38.5K and a zero-resistance temperature at 38K. The critical current density of the films is 105A/cm2.
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