Insight into high temperature performance of magnetron sputtered Si-Ta-C-(N) coatings with an ion-implanted interlayer

Abstract

Challenges related to the application of wear resistant coatings at high temperatures require the development of novel materials with an exceptional combination of mechanical, chemical and tribological properties. The present paper is focused on understanding of relationships between structure, composition and high-temperature performance of the Si-Ta-C-(N) coatings. The coatings were produced using combined magnetron sputtering (MS) and ion implantation (CMSII) technique. It was found that ion implanted coatings demonstrated better thermal shock resistance compared to MS Si-Ta-C-(N) coatings. The Si-Ta-C-(N) coatings revealed a nanocomposite structure consisting of 2–3 nm fcc TaC(N) grains and amorphous a-Si and a-SiC(N) phases. The composition and structure of amorphous matrix and nanocrystallites strongly affected tribological performance of the Si-Ta-C-(N) coatings. The N-doped coatings exhibited exceptionally good tribological performance due to a higher ductility of N-rich amorphous a-SiCN and a-SiNx matrix, and fcc Ta(C,N)-based crystallites compared with the a-Si + a-SiC, and fcc TaC-based phases in N-free coating. The Si-Ta-C-(N) coatings easily withstood oxidation annealing at 800 °C due to the formation of a 200 nm protective TaSiOx amorphous layer. Oxidation annealings revealed that under thin protective TaSiOx layer crystalline components of coatings did not change when Si and C from the amorphous matrix started to diffuse towards the substrate at 800 °C but even after redistribution of elements and formation of oxide scale the coatings demonstrated reasonably high hardness – 13–16 GPa. Triboactivated formation of TaSiOx fibers which could slide/roll against the same TaSiOx tribolayer during high-temperature tribotests resulted in low coefficient of friction values (0.23 at 800 °C) and absence of wear.