Abstract

The heteroepitaxial growth of III-V compound semiconductors on Si would enable the integration of high-performance III-V materials with Si technology. We report epitaxial growth on (111)-oriented Si surfaces of highly aligned, single crystalline InP nanowires by chemical vapor deposition catalyzed by Au. We demonstrate laterally oriented InP nanowires bridging between vertical (111) Si surfaces formed by anisotropically etching a (110)-oriented Si substrate or the top Si layer of a silicon-on-insulator wafer. This method of connecting nanowires offers a facile way of integrating nanoscale III-V optoelectronic and photonic devices with Si.

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