Abstract

Metalorganic molecular beam epitaxy (MOMBE) is shown to be a very practical growth method for epitaxial films on (110) InP substrates. Smooth surfaces can be obtained for InP, InGaAs, InGaAsP and InGaAs/InGaAsP multiple quantum wells (MQWs) by slightly angling the substrate orientation towards the [111]A or [111]B direction. The full width at half maximum (FWHM) values of X-ray diffraction spectra for InGaAs and InGaAsP are close to those of InP. In addition, InGaAs/InGaAsP MQWs on (110) InP have a photoluminescence intensity at room temperature comparable to the highest intensity of MQWs on (001) InP. A fabricated broad-area InGaAs/InGaAsP MQW laser exhibits a threshold current density of 0.83 kA/cm 2.

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