Abstract
After a discussion of several fundamental aspects connected with the mass spectrometry of sputter-removed particles for surface and thin-film analysis and a comparison between secondary neutral mass spectrometry (SNMS) and glow discharge mass spectrometry, novel instrumental development in SNMS for the analysis of electrically insulating materials are described. Subsequently, the utilization of MCs + molecular ions in secondary ion mass spectrometry (SIMS) is discussed. In both instances the instrumental and methodical progress is elucidated by appropriate examples of SNMS and SIMS depth profiling analysis of various dielectric and metal multi-layer structures, and of the application of HCs + ions to hydrogen detection.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
