Inorganic Fibers and Microstructures by Laser Assisted Chemical Vapor Deposition

Abstract

Using high reactor pressures (>1 bar) and a unique rate control mechanism, chemically pure and structurally uniform boron, carbon, silicon, silicon nitride, and silicon carbide fibers were obtained by laser assisted chemical vapor deposition (LCVD) with small diameters (>9 μm) and high growth rates (0.3–1.1 mm/s). The boron, carbon, and silicon nitride fibers were amorphous; the silicon carbide fibers polycrystalline; and the silicon fibers either glassy, polycrystalline, or single crystals. The LCVD method can be used to grow three-dimensional microstructures (grids, springs, solenoids) directly from the vapor phase. A commercial multifilament process is being developed.