Abstract
In recent years, the trend in miniaturization of products has been pervasive in areas such as information technology, biotechnology, and the environmental and medical industries. Micro/Nano patterning is the key supporting technology that has to be developed to meet the challenges posed by the requirements of product miniaturization and the industrial realization of nanotechnology. Micro/Nano patterning techniques can be carried out by techniquesbased on energy beams or solid cuttingtools (tool-based micro-machining). Tool-based micro/nano patterning is a relatively new area; however, over the lasttwo decades, owing to the predominant trend in miniaturization of products, Micro/Nano patterning using tool-based techniques has become a key supportive technology. The energybeam-based patterning process (electron-beam lithography) hassome limitations due to poor control of 3D structures, low material removal rate and low aspect ratio. Moreover, these processes requirespecial facilities, and the maximum achievable thickness is relatively small. Some of theselimitations can be overcome by a tool-based approach using ultra-precision machine tools and solid tools as cutting elements to produce the micro-features with well-controlled shape and tolerances. These Micro/Nano machining-based patterning techniques have been achieved through a paradigm shift in the ideas and processes of conventional machining. In this paper, an attempt has beenmade to present the recent innovations in tool-based micro/nano patterning processes.
Highlights
Owing to recent trends in the miniaturization of products in areas such as information technology, biotechnology, and the environmental, medical and optics industries, the micro/nano patterning process using tool-based micro/nano machining is becoming a key supportive technology
All of these advances in micro/nano patterning processes have been achieved as a result of revolutionary innovations in machine tools
An attempt has been made to present the recent advances in the machine tools and the machining processes for micro/nano patterning using a tool-based approach
Summary
Owing to recent trends in the miniaturization of products in areas such as information technology, biotechnology, and the environmental, medical and optics industries, the micro/nano patterning process using tool-based micro/nano machining is becoming a key supportive technology. Present laboratoryscale and industrial fabrication techniques using LIGA require special and extremely expensive facilities like a synchrotron system and the machining of expensive masks that have hindered the quick and economical fabrication of micro parts Such processes offer an extremely low dimensional range, and often they are not required for a particular application. A combination of conventional turning and nonconventional electrical discharge machining can be used to produce micro hole patterns Thanks to such innovations in recent years, micro patterning using micro machining has become widely accepted for various applications. If semiconductors and optical devices can be fabricated by rollto-roll manufacturing on large substrates, many devices could be fabricated at a fraction of the cost of the traditional manufacturing process All of these advances in micro/nano patterning processes have been achieved as a result of revolutionary innovations in machine tools. An attempt has been made to present the recent advances in the machine tools and the machining processes for micro/nano patterning using a tool-based approach
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