Inner-Shell Ionization

Abstract

The electron energy-loss spectrum contains, at higher energy losses (above 50 eV), characteristic edges due to ionization of inner atomic shells. These edges are of considerable interest to the electron microscopist because they permit the qualitative and quantitative microanalysis of nearly all chemical elements on a nanometre scale. However, additional insight into the chemical and structural properties associated with the atom being excited may be gained by examination of the fine structure of these edges.