Abstract
nner hole diameter measuring system based on capacitive sensor was introduced in this paper, the structure characteristic of coaxial cylindrical capacitive probe in measuring inner hole diameter was analyzed;aiming at the signal analysis and control for the whole measurement system, the equipotential guard ring technique was adopted to eliminate edge effect caused for the sensors effective measuring polar plate, the transform circuit with operational amplifier was adopted to overcome the nonlinear defects resulted from polar distance change, the driving cables technique was used to reduce the influence of parasitic capacitance;and then we realize the precision diameter measurement in holes any depth.
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