Abstract
Flexible pressure sensors play a key role as an interface between the mechanical movements and electrical stimuli in smart skins, soft robotics, and health monitoring systems. However, conventional pressure sensors face several challenges in terms of their bio-compatibility, higher cost, and complicated fabrication process. This paper demonstrates a novel 5 × 5 bio-compatible capacitive and self-powered piezoelectric pressure sensor array using natural inner egg shell membrane (IESM). The proposed sensor array is supported by two different sensing modes, which are capacitive and piezoelectric function dominant self-powered mode. The capacitive mode can detect both static and dynamic pressures and the piezoelectric function dominant self-powered mode can be adopted to detect the dynamic pressure applied on the device. The fabricated device with a sensing area of 4 mm2 offered the sensitivity of 37.54 ± 1.488 MPa−1 in the capacitive pressure sensing range from 0 to 0.05 MPa. The device showed the response (Tres) and recovery time (Trec) of 60 ms and 45 ms, respectively. The device achieves the sensitivity of 16.93 V MPa−1 from the sensing range of 0 to 0.098 MPa in the self-powered pressure sensing. These results depict that the proposed pressure sensor array will ensure a promising role in green, wearable, and soft electronic applications.
Highlights
Diversi ed so and exible pressure sensors have been extensively studied for a variety of potential applications, such as smart skins, automotive systems, biomonitoring devices, and so robotics.[1,2,3,4,5,6,7,8,9] Different pressure sensing technologies have been developed so far, based on the various operating mechanisms, such as piezoresistivity, piezoelectricity, and capacitance
A er the vinegar treatment, functional groups of the inner egg shell membrane (IESM) were analyzed by the Fourier transform infrared spectroscopy (FTIR)
The FTIR analysis of the untreated IESM was reported by Hsieh et al, which shows that the peak of the IESM elaborated as:[55 661] cmÀ1 represents C–S band, 1109 cmÀ1 represents amine C–N band, 1451 cmÀ1 represents CH2 band, 1536 cmÀ1 represent amide N–H band, 1643 cmÀ1 represents amide C]O band, 2929 cmÀ1 represents C–H band, and 3274 cmÀ1 represents O–H and N–H band
Summary
A self-powering pressure sensor is required without an air gap, so that it can be rmly attached with the monitoring body. The piezoelectric pressure sensor presented the comparable results with the previously fabricated biocompatible sensing devices.[42,51,52,53,54] The self-powered pressure sensor with the sensing area of 4 mm[2] shows a fast response and recovery time (
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