Abstract
Long-narrow tubes are widely used in industry as water pipes, gas pipes and cooling pipes, etc. It is necessary to protect the inside of a metallic or dielectric tube against inner wall corrosion due to the inner surface being damaged by high temperature fluid or chemically reactive liquid. For thin film sputter coating on the inner wall of long-narrow tubes, the authors have developed the coating reactors using a coaxial magnetron pulsed plasma (CMPP) and a coaxial electron cyclotron resonance plasma (CECRP).
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