InN/InAlN heterostructures for new generation of fast electronics

Abstract

N-polar InN/In0.61Al0.39N heterostructures are grown directly on sapphire by using metalorganic chemical vapor deposition. The thickness of Mg-doped In0.61Al0.39N is 340 nm, and the root-mean-square surface roughness of 20 nm thick InN is ∼3.2 nm. An optional AlN spike grown at 710 °C for 35 s is used either as an interlayer to separate the InAlN buffer from the InN channel or as a part of InAlN nucleation after sapphire nitridation. High-resolution transmission electron microscopy reveals approximately two monolayers of AlN if used as the interlayer. In this case, the concentration of screw and edge threading dislocations in partially strained InN decreased down to 6.5 × 109 and 38 × 109 cm−2, respectively. More importantly, the interlayer inclusion suppressed remote donor and alloy disorder scatterings, providing, at room temperature, the InN free electron mobility and concentration of 620 cm2/V s and 3 × 1013 cm−2, respectively. On the other hand, omitting the AlN spike by InAlN nucleation led to structural deteriorations while buffer resistivity increased to 1.7 kΩ/□. A current density of ∼12–16 A/mm, breakdown field of ∼75 kV/cm, and electron drift velocity of ∼2 × 107 cm/s were determined in InN by applying 10 ns voltage pulses on fabricated test resistors.