Abstract

Geometric design and compensation rules aim to guarantee that layout representations match final printed patterns within a valid tolerance for a desired process yield. The more conservative the rules are, the better is the yield. So, for a given process and after an experimental extraction of the required process parameters, it is possible to derive minimum design rules that characterize the technology process to a point where design engineers can address physical design to develop devices and systems without a deep knowledge of process and materials.A methodology to extract and characterize inkjet geometric design and compensation rules is proposed in this work as a first step to separate design from fabrication in a similar way as in silicon technology.

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