Abstract
A high-power KrF laser system was developed on the basis of a large-aperture excimer laser with electronbeam pumping and injection control by an electric-discharge master oscillator. The spectral brightness of the radiation of line width ~0.1 cm-1, tunable near λ = 248 nm, was ~5 × 1014 W cm-2 sr-1 per cm-1 at a peak power of ~1 GW.
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