Initiation and propagation of interfacial delamination in integrated thin-film structures

Abstract

Interfacial delamination has been a major reliability issue for both BEoL and packaging systems. The failure is often due to poor adhesion of interfaces. Thus characterization of interfacial properties is critical for material selection and process control. Conventional methods for interfacial adhesion and fracture toughness measurements are generally based on linear elastic fracture mechanics. More detailed local measurements are required to fully characterize the interfaces based on a nonlinear cohesive interface model. With the experimentally determined interfacial properties, cohesive interface modeling can be set up to predict the initiation and evolution of interfacial failure in chip-package systems. In this study, two model systems are considered by approaches of both linear elastic fracture mechanics (LEFM) and cohesive interface modeling (CIM). First, for a brittle thin film on a compliant substrate, the initiation and propagation of delamination from the root of a channel crack is simulated. The effects of the cohesive strength and fracture toughness of the interface on channel cracking of thin films on compliant substrates are analyzed. Second, a four-point bend test is considered, in comparison with experimental measurements of the local crack opening displacements.