Abstract
In this paper, a novel monolithic structural design of a piezoelectric (PZT) inchworm motor utilizing three force amplification mode (FAM) mechanisms is presented as an approach to overcome the design challenges of common PZT inchworm motors. A mechanical system model based on Simulink software was developed for a proposed inchworm motor design. The dynamic response of the motor was simulated at the moment of releasing the pre-stressed mechanism. The results showed a backlash response due to the mass acceleration of the mechanisms.
Highlights
Piezoelectric inchworm linear motor are common devices in high precision positioning applications, such in optical equipment and precision manufacturing
In this paper, a novel monolithic structural design of PZT inchworm motor utilizing three Force-Amplification-Mode mechanisms is presented as an approach to overcome design challenges of common PZT inchworm motors
A mechanical system model based on Simulink software was developed for a proposed inchworm motor design
Summary
Piezoelectric inchworm linear motor are common devices in high precision positioning applications, such in optical equipment and precision manufacturing. Inchworm motors can be realized with one or multiple piezoelectric (PZT) stacks. Flexural mechanisms can be designed to amplify the generated displacement or force by the PZT stack, for example by applying mechanical lever design concept. Miniaturization, large-force actuation capability, large internal stresses, fragile flexural design based on lever concept and requirement for high precision manufacturing are main challenges for realizing PZT inchworm motor based on amplified mechanisms design. Initially confined by a mechanical guidance, and become released when the corresponding PZT element is electrically polarized. The other mechanism is centered between the clamping units, and perform device stretching when the corres ponding PZT element is electrically polarized
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