Abstract
AgPd superlattices were prepared by sequential thermal evaporation in a high-vacuum system. The structure of the films has been investigated on the basis of large-angle X-ray diffraction spectra measured in Θ–2Θ reflection geometry. Comparison between experimental and calculated spectra shows that the interplanar distance in palladium layers is dependent on the percentage concentration of palladium atoms in the superlattice unit cells. Ion implantation with 300 keV Ar 2+ ions has been performed in order to study the ion-beam-mixing process in the AgPd superlattice targets. The mixing parameter Dt ΦF D = 22.5 A ̊ 5/eV is determined for the initial stage of the process (i.e. for ion doses ranging from 4 × 10 13 to 5 × 10 14 ions/cm 2).
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