Abstract
The island stage of the anodic oxidation of GaAs was investigated with transmission electron microscopy (TEM). Many island details are seen in the high-resolution photomicrographs of platinum–carbon secondary replicas of the GaAs surface. The nucleation and coalescence processes are seen to take place continuously during the passivation time. The islands are normally circular in shape except when altered by coalescence. The height of the islands increase with island size up to an area of ≊0.1 μ2 after which the island height increases only slowly or not at all.
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