Initial stages in the growth of carbon films produced in an Ar–CH4–H2 microwave discharge: Composition and surface layers morphology

Abstract

X-ray photoelectron spectroscopy and atomic force microscopy are employed in the characterization of the first stages in the growth of carbon layers on a (001) Si substrate which is not scratched with diamond powder before placing it in an Ar–2%CH4–H2 plasma discharge. Results show that the first layers could be formed in SiC grains where the carbon diamond particles nucleate. The high nucleation density of 1.109–5.109 nuclei. cm−2 and the low aggregates density lead to a smooth surface.