Abstract
ABSTRACTThe growth mode and the relaxation of MBE grown InxGa1-xiAs layers (0.13 ≦ x ≦ 1.0, nominal film thickness 5 nm) on GaAs(100) substrates with a lattice-parameter mismatch were investigated by transmission electron microscopy (TEM). The transition between two- and three-dimensional growth occurs at x ≈ 0.4. The three-dimensional growth mode for x ≥ 0.6 results in a wide spectrum of island sizes. In contrast to the two-dimensional growth mode, the strain state of a three-dimensionally growing layer is completely inhomogeneous because the relaxation of the strain is correlated with the island size. The reduction of elastic strain for islands is reasonably described by an energy balance model.
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