Abstract
In N-rich growth conditions, prismatic domains were formed in the initial stage of a cyclotron assisted MBE of GaN over 6H-SiC (0001). They exhibit {10 0} facets and are either voids or amorphous phase. Their density is of a few 109 cm−2 and they are located in a 50 nm layer closest to the substrate surface.
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More From: MRS Internet Journal of Nitride Semiconductor Research
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