Initial Growth of Functional Plasma Polymer Nanofilms

Abstract

To gain deeper insights into the initial growth mechanism, with respect to functional group density and cross-linking, plasma polymer films (PPFs) were deposited from C2H4/NH3 discharges. Keeping gas phase processes and electrical discharge conditions constant all over the deposition process, the mass deposition rate of the PPF was found to be initially lower and regularly increasing before reaching steady-state conditions after a film thickness of about 5 nm on metal oxide substrates. The first gradient nano-layer, i.e. the first 5 nm deposited, were observed to possess less amino functional groups and to be more cross-linked and thus more stable compared to the film prepared in steady state conditions, in which the uniform film comprises more amino functional groups, yet is less cross-linked and thus less stable. Due to its sticking probability, the substrate thus influences the initial deposition rate. Over plasma exposure time, the substrate becomes covered by an initial layer of PPF and the film-forming species are no longer deposited onto the pristine substrate but onto the already deposited organic polymer film. The preparation of the highly stable functional nanofilm, i.e. the initial PPF layer, can lead to new possible applications and fast deposition processes.