Abstract

Because of the porosity existing within homogeneous films deposited by conventional electron beam gun, they are well known to have spectral shifts after deposition (aging effect). Inhomogeneous films also show dynamic changes such as spectral shifts and stress changes induced by water sorption during and after film deposition. The related structure models for both of homogeneous and inhomogeneous films, which explain these behaviours have been proposed and examined(1). To overcome these effects, various ion based processes such as ion assisted deposition(IAD)(2), and ion plating(IP)(3), have been extensively used in recent years.

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