Abstract
The controlled fabrication of self-assembled InGaAs nanostructures i.e., quantum ring (QR) and quantum-dot-in-ring (QDIR) by droplet epitaxy is reported. The effects of crystallization temperature (170–260°C) on the nanostructure shape, dimension, density, and depth profile are investigated. The QRs transform to QDIRs when the crystallization temperature is increased. At transformation state, the QRs with distorted nanohole profile along the [1–10] crystallographic direction are observed. The formation mechanism can be explained by the competitive crystallizations in and around the nanodroplet and strain relaxation in the nanohole.
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