Abstract

Infrared multiphoton absorption and dissociation of 1,2-dichloroethyltrifluorosilane molecules under the action of pulsed TEA CO2 laser were experimentally studied. The composition of dissociation products was analyzed. The only products of dissociation have been found to be stable molecules: chloroethylene and trifluorochlorosilane. Dissociation proceeds via chlorine atom transfer from carbon to silicon. The silicon isotope-selective infrared multiphoton dissociation was performed at different wavelengths of the CO2-laser radiation. High degrees of silicon isotope separation have been achieved.

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