Abstract
Using a reversal nanoimprint and metal evaporation process, we fabricated a micropolarizer array for the 2.5-7μm wavelength region. The micropolarizer array has a unique unit, which is composed of 2×3 arrays on an intrinsic silicon substrate. Each array consists of a 200nm period bilayer Al grating in a 1.3 mm×1.3 mm aperture. The transmittance of transverse magnetic polarization of each array is greater than 65% in the 2.5-7μm wavelength range, and the extinction ratio is over 35dB in the 3-4μm and 6-7μm wavelength range. This fabricated micropolarizer array has lower costs and better compatibility with microfabrication processes.
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