Abstract
AbstractPlasma polymerizations of aluminium‐acetylacetone (AlAcAc) complex using a magnetically enhanced plasma reaction system were investigated as functions of the system pressure and the substrate temperature. The system pressure and the substrate temperature rather than the RF power played an important role in plasma polymerization reactions. The high system pressure and the high substrate temperature led to bond scission of monomers to yield plasma polymers rich in aluminium moieties. The chemical composition of plasma polymers prepared from AlAcAc complex was discussed from spectroscopic results with FT‐IR and XPS.
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