Abstract
Fabricating a multilayer structure with different modulation periods (Λ) is an attractive approach to adjust the properties of the monolithic coatings. Here, multi-layered AlTiSiN/AlCrSiN coatings with Λ ranging from 25 to 147 nm were prepared by the arc ion plating technique. The effects of Λ on the structure and properties of the coatings were investigated systematically. Results showed that all the coatings had a mixed-phase structure consisting of TiN and CrN in rock salt structure and AlN in wurtzite structure. The coating at Λ = 60 nm displayed the optimized hardness and elastic modulus, corresponding to 31.6 GPa and 514 GPa, and the coating at Λ = 25 nm possessed the highest adhesion strength with Lc1 = 41.5 N, Lc2 = 80.2 N, and CPRS = 1606.1 N2. The tribological test showed that the AlTiSiN/AlCrSiN coatings exhibited abrasive wear behavior and the coating at Λ = 25 nm demonstrated the lowest COF of 0.26 and the minimum wear rate of 8.3×10−7mm3/Nm.
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