Influences of Interfacial Carbonization on the Structure and Mechanical Properties of Multilayered Cr-Containing Diamond-Like Carbon Films

Abstract

Regarding metal-containing diamond-like carbon (Me-DLC) multilayered films, current research has focused on the influences of macroelements in the transition layer on the mechanical properties. The understanding of influences of microinterfacial structures on the mechanical properties is far from enough. One example is the structure pattern due to carbonation around the layer-to-layer interfaces in the Me-DLC films. In this work, multilayered Cr-DLC films with three modulation periods (Λ) were deposited using midfrequency dual-magnetron sputtering, and the film microstructures and mechanical properties were investigated. Along with changes in Λ, interfacial carbonization induces microstructure changes, and the microstructures include carbon bond, phase compositions, and internal stresses. The microstructure changes affect the mechanical properties, including hardness, elastic modulus, fracture toughness, and adhesion. The results reveal that variation of mechanical properties is involved with the influenc...